Coherent Diffraction Imaging of Single 95nm Nanowires

Details Coherent Diffraction Imaging of Single 95nm Nanowires Coherent Diffraction Imaging of Single 95nm Nanowires

2008-09-12

arxiv.org/abs/0809.2222v4

Phys. Rev. B 79 (2009), 195401

Physics

Instrumentation and Detectors

5 pages, 5 figures

Scientific paper

10.1103/PhysRevB.79.195401

Photonic or electronic confinement effects in nanostructures become significant when one of their dimension is in the 5-300 nm range. Improving their development requires the ability to study their structure - shape, strain field, interdiffusion maps - using novel techniques. We have used coherent diffraction imaging to record the 3-dimensionnal scattered intensity of single silicon nanowires with a lateral size smaller than 100 nm. We show that this intensity can be used to recover the hexagonal shape of the nanowire with a 28nm resolution. The article also discusses limits of the method in terms of radiation damage.

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