Coating of silicon pore optics

Details Coating of silicon pore optics Coating of silicon pore optics

Aug 2009

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2009spie.7437e..36j&link_type=abstract

Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV. Edited by Jensen, C. P.; Ackermann, M.; Christensen, F. E.; Collon, M. J.; Kr

Physics

Optics

Scientific paper

For the International X-ray observatory (IXO), a mirror module with an effective area of 3 m2 at 1.25 keV and at least 0.65 m2 at 6 keV has to be realized. To achieve this goal, coated silicon pore optics has been developed over the last years. One of the challenges is to coat the Si plates and still to realize Si-Si bonding. It has been demonstrated that ribbed silicon plates can be produced and assembled into stacks. All previously work has been done using uncoated Si plates. In this paper we describe how to coat the ribbed Si plates with an Ir coating and a top C coating through a mask so that there will be coating only between the ribs and not in the area where bonding takes place. The paper includes description of the mounting jig and how to align the mask on top of the plate. We will also present energy scans from Si plates coated through a mask.

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