Chemically vapor deposited silicon carbide (SiC) for optical applications

Details Chemically vapor deposited silicon carbide (SiC) for optical applications Chemically vapor deposited silicon carbide (SiC) for optical applications

Oct 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1118....2p&link_type=abstract

IN: Space optical materials and space qualification of optics; Proceedings of the Meeting, Orlando, FL, Mar. 30, 31, 1989 (A90-4

Physics

Optics

1

Ceramic Coatings, Optical Properties, Silicon Carbides, Mirrors, Optical Radar, Solar Collectors, Vapor Deposition

Scientific paper

Important physical, optical, thermal, and mechanical properties of cubic (beta) silicon carbide produced via a bulk chemical vapor deposition (CVD) process, developed at CVD Incorporated, are presented in this paper. The material's properties make it an ideal candidate material for optical components for lidar mirrors, solar collectors and concentrators, and astronomical telescopes. The CVD process has been scaled to produce large monolithic pieces of bulk SiC, i.e., disks up to 60-cm (24-in.) diameter and plates up to 76-cm (30-in.) long by 46-cm (18-in.) wide with thickness up to 13 mm (0.5 in.).

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