Chemical-mechanical polishing of low-scatter optical surfaces

Details Chemical-mechanical polishing of low-scatter optical surfaces Chemical-mechanical polishing of low-scatter optical surfaces

Jul 1980

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1980apopt..19.2329m&link_type=ejournal

Applied Optics, vol. 19, page 2329

Physics

Optics

3

Optical Fabrication, Surfaces, Silicon

Scientific paper

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