Characterization of an ArF excimer laser beam from measurements of the Wigner distribution function

Details Characterization of an ArF excimer laser beam from measurements of the Wigner distribution function Characterization of an ArF excimer laser beam from measurements of the Wigner distribution function

Apr 2011

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011njph...13d3013s&link_type=abstract

New Journal of Physics, Volume 13, Issue 4, pp. 043013 (2011).

Physics

1

Scientific paper

An ArF excimer laser beam at a wavelength of 193 nm has been characterized by a quantitative determination of the Wigner distribution function. The setup, comprising a spherical lens, a rotating cylindrical lens and a moveable ultraviolet-sensitive CCD detector, enabled the mapping of the entire four-dimensional phase space within less than 20 min. Experiments yielded complete information about second-order moment-based parameters, spatial coherence, wavefront, beam profiles, as well as beam propagation and local distributions of radiant intensities.

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