Carbonaceous Particles Production in a Sputtering Discharge

Details Carbonaceous Particles Production in a Sputtering Discharge Carbonaceous Particles Production in a Sputtering Discharge

Oct 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..522d&link_type=abstract

NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum

Physics

Dusty Plasmas, Carbon, Sputtering, Glow Discharges, Dusty Or Complex Plasmas, Plasma Crystals

Scientific paper

Spherical dust particles have been produced in argon glow discharge by sputtering of a graphite cathode. Their size varies from 40 to 200 nm depending on the distance between the two electrodes and the largest ones have a cauliflower shape. Simulations giving the evolution of the energy distribution of sputtered carbon atoms suggest a mechanism of growth by carbon vapour condensation. The chemical composition and structure of particles have been investigated by infrared spectroscopy and appear to be a complex arrangement of the carbon atoms and hetero-atoms.

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