Capillary Discharge-Pumped EUV Laser And Its Applications

Physics – Optics

Scientific paper

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X- And Gamma-Ray Lasers, Beam Characteristics: Profile, Intensity, And Power, Spatial Pattern Formation, X- And Gamma-Ray Sources, Mirrors, Gratings, And Detectors

Scientific paper

EUV lasers have assumed great practical importance for applications such as high spatial resolution interferometric lithography, characterization of EUV optics, ablation of materials, EUV microscopy and guiding of laser beam. For many potential applications involving light-matter interaction and nonlinear physics, the achievable light intensity is a critical parameter. High intensity could be realized by focusing high pulse energy light with good beam quality. In this report recent results obtained in our laboratory by using a 46.9nm capillary discharge laser are presented.

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