Calibration of frequency response function for a phase-shifted interferometer

Details Calibration of frequency response function for a phase-shifted interferometer Calibration of frequency response function for a phase-shifted interferometer

Oct 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4231..397g&link_type=abstract

Proc. SPIE Vol. 4231, p. 397-401, Advanced Optical Manufacturing and Testing Technology 2000, Li Yang; Harvey M. Pollicove; Qimi

Physics

Optics

Scientific paper

There is very strong need to test mid-frequency power spectrum density (PSD) for optical surface used in high power laser system, aerospace high resolution camera, astronomy optical system, and X-ray optics, etc. To improve measurement accuracy and remove the error, the calibration of frequency response function for a phase-shifted interferometer must be done before PSD is tested by this interferometer. In this paper, the intensity function contributed by three plane-waves interference is given at first. On basis of this function, the sinusoidal phase grating with variable frequency formed by two plane-waves interference with appropriate ratio of two amplitudes is discussed and is used to calibrate the frequency response function of an interferometer. A test example is given and some error sources are pointed out and studied.

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