Bidirectional ellipsometry and its application to the characterization of surfaces

Details Bidirectional ellipsometry and its application to the characterization of surfaces Bidirectional ellipsometry and its application to the characterization of surfaces

Oct 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.3121..173g&link_type=abstract

Proc. SPIE Vol. 3121, p. 173-182, Polarization: Measurement, Analysis, and Remote Sensing, Dennis H. Goldstein; Russell A. Chipm

Physics

1

Scientific paper

The polarization of light scattered out of the pane of incidence was
measured from rough and microrough silicon, polished fused silica and
glass ceramic, and ground and polished black glass. The measurement
defects, demonstrating that the polarization light can be used to
distinguish between microroughness and subsurface defects.

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