Physics – Optics
Scientific paper
Jun 2007
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007apopt..46.3156s&link_type=abstract
Applied Optics IP, vol. 46, Issue 16, pp.3156-3163
Physics
Optics
3
Surface Measurements, Roughness, Thin Films, Optical Properties, X-Ray Mirrors
Scientific paper
The high-spatial frequency roughness of a mirror operating at extreme ultraviolet (EUV) wavelengths is crucial for the reflective performance and is subject to very stringent specifications. To understand and predict mirror performance, precision metrology is required for measuring the surface roughness. Zerodur mirror substrates made by two different polishing vendors for a suite of EUV telescopes for solar physics were characterized by atomic force microscopy (AFM). The AFM measurements revealed features in the topography of each substrate that are associated with specific polishing techniques. Theoretical predictions of the mirror performance based on the AFM-measured high-spatial-frequency roughness are in good agreement with EUV reflectance measurements of the mirrors after multilayer coating.
Baker Sherry L.
Golub Leon
Gullikson Eric M.
Podgorski William A.
Robinson Jeff C.
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