Assessment of surface topography by X-ray scattering measurements

Details Assessment of surface topography by X-ray scattering measurements Assessment of surface topography by X-ray scattering measurements

Oct 1988

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1988ose..cong.....a&link_type=abstract

Presented at the International Congress on Optical Science and Engineering, Hamburg, Fed. Republic of Germany, Sep. 1988

Physics

Optics

Mirrors, Point Spread Functions, Surface Finishing, X Ray Scattering, X Ray Telescopes, Algorithms, Manufacturing, Mechanical Measurement, X Ray Diffraction

Scientific paper

In the context of developing optics for X-ray astronomy, measurements of a variety of flat mirrors and telescopes revealed that the total integrated scatter (TIS) formalism, well known in the optical regime, also describes the surface scattering of soft X-rays. A quantitative formalism is derived to separate the spectrum of spatial surface wavelengths into components which can be treated in a geometrical optics approach and those which need exact diffraction treatment. The method is applied to predict the X-ray point spread function of telescopes from mechanical profile measurements. The agreement between prediction and mesurement is remarkably good.

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