Angstrom level profilometry for sub-millimeter to meter scale surface errors

Details Angstrom level profilometry for sub-millimeter to meter scale surface errors Angstrom level profilometry for sub-millimeter to meter scale surface errors

Nov 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990spie.1333..326g&link_type=abstract

IN: Advanced optical manufacturing and testing; Proceedings of the Meeting, San Diego, CA, July 9-11, 1990 (A92-17451 05-74). Be

Physics

Optics

2

Error Analysis, Metrology, Profilometers, Surface Roughness, Surface Geometry, Ultraviolet Telescopes, X Ray Telescopes

Scientific paper

A versatile noncontacting profilimetry approach is defined which involves the measurement of the local curvature of a test piece by simultaneously measuring its slope at two slightly displaced locations. Several extensions of the measurement technique are emphasized including beam expansion for long scans, measurement of circularity and cone angle of near cylindrical optics, and measurement of absolute flatness.

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