Angstrom level profilometry for sub-millimeter to meter scale surface errors

Physics – Optics

Scientific paper

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Error Analysis, Metrology, Profilometers, Surface Roughness, Surface Geometry, Ultraviolet Telescopes, X Ray Telescopes

Scientific paper

A versatile noncontacting profilimetry approach is defined which involves the measurement of the local curvature of a test piece by simultaneously measuring its slope at two slightly displaced locations. Several extensions of the measurement technique are emphasized including beam expansion for long scans, measurement of circularity and cone angle of near cylindrical optics, and measurement of absolute flatness.

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