Analytical approach to backscattering of low-energy electrons

Physics

Scientific paper

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Backscattering, Electron Scattering, Monte Carlo Method, Electron Flux Density, Nitrogen, Oxygen, Pitch (Inclination), Spectrum Analysis

Scientific paper

The backscattered flux and energy of electrons when a monoenergetic electron is incident in a gas at any pitch angle are calculated using an approach based on spatial yield spectra. The four-dimensional yield spectrum function is defined and the equations for calculating the backscattered flux and energy are derived. The calculated backscattered flux and energy are compared to the data of Mantas and Walker (1976) and the data correlate well.

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