An auxiliary visible imaging method for alignment of x-ray Kirkpatrick-Baez optics

Details An auxiliary visible imaging method for alignment of x-ray Kirkpatrick-Baez optics An auxiliary visible imaging method for alignment of x-ray Kirkpatrick-Baez optics

May 2009

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2009spie.7360e..25m&link_type=abstract

EUV and X-Ray Optics: Synergy between Laboratory and Space. Edited by Hudec, René; Pina, Ladislav. Proceedings of the SPIE, Vo

Physics

Optics

Scientific paper

An auxiliary visible imaging method was introduced to solve the axial and pointing alignment of x-ray Kirkpatrick-Baez optics. Through ZEMAX simulation and x-ray imaging experiments, the axial and pointing alignment accuracy were determined to be +/-300μm and +/-20μm respectively. The numerical aperture of x-ray Kirkpatrick-Baez optics is rather small, so it's impossible to adjust Kirkpatrick-Baez system by visible imaging directly. An auxiliary visible lens was designed, which was equivalent to x-ray Kirkpatrick-Baez optics on conjugate relationship and accuracy control. The comparative experiments of visible imaging and x-ray imaging indicate that this auxiliary system could meet the alignment accuracy of Kirkpatrick-Baez optics.

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