Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

Details Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

2011-04-24

arxiv.org/abs/1104.4613v1

Physics

Plasma Physics

Scientific paper

Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp2 carbon and hydrogenated sp3 carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.

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