Accurate measurement of the flatness of etalons

Details Accurate measurement of the flatness of etalons Accurate measurement of the flatness of etalons

May 1999

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1999spie.3740..606i&link_type=abstract

Proc. SPIE Vol. 3740, p. 606-609, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), Ichirou Yamaguchi; Ed.

Physics

Scientific paper

The method of measurement of two-dimensional flatness of etalons are
proposed. Fundamental idea is to measure diameters of interference rings
produced on CCD camera. The reproducibility is about (lambda) /1800.

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