Absolute multilayer characterization at high spatial resolution via real-time soft x-ray imaging

Details Absolute multilayer characterization at high spatial resolution via real-time soft x-ray imaging Absolute multilayer characterization at high spatial resolution via real-time soft x-ray imaging

Nov 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1159..655m&link_type=toc

Proc. SPIE Vol. 1159, p. 655-0, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics, Charles J. Hailey; O

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Atomic Physics

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