Physics – Optics
Scientific paper
2008-03-07
Proc. SPIE 6924 (2008) 692450, (Optical Microlithography XXI, H.J. Levinson, M.V. Dusa, Eds.)
Physics
Optics
9 pages, 7 figures, SPIE conference Advanced Lithography / Optical Microlithography XXI (2008)
Scientific paper
10.1117/12.771989
Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and design of nanostructured optical components. A vectorial finite element method (FEM) is a good choice for an accurate modeling of complicated geometrical features. However, from a numerical point of view solving the arising system of linear equations is very demanding even for medium sized 3D domains. In numerics, a domain decomposition method is a commonly used strategy to overcome this problem. Within this approach the overall computational domain is split up into smaller domains and interface conditions are used to assure continuity of the electromagnetic field. Unfortunately, standard implementations of the domain decomposition method as developed for electrostatic problems are not appropriate for wave propagation problems. In an earlier paper we therefore proposed a domain decomposition method adapted to electromagnetic field wave propagation problems. In this paper we apply this method to 3D mask simulation.
Burger Stefaan
Schädle Achim
Schmidt Frederic
Zschiedrich Lin
No associations
LandOfFree
A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-252908