Physics – Optics
Scientific paper
Mar 2009
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2009pasp..121..260e&link_type=abstract
Publications of the Astronomical Society of the Pacific, Volume 121, issue 877, pp.260-265
Physics
Optics
2
Astronomical Instrumentation
Scientific paper
We present our first results on the development and evaluation of a cryogenic deformable mirror (DM) based on Micro Electro Mechanical Systems (MEMS) technology. A MEMS silicon-based DM chip with 32 channels, in which each channel is N, zooming optics, electric drivers. The surface of the mirror at 95 K deformed in response to the application of a voltage, and no significant difference was found between the deformation at 95 K and that at room temperature. The power dissipation by the cryogenic DM was also measured, and we suggest that this is small enough for it to be used in a space cryogenic telescope. The properties of the DM remained unchanged after five cycles of vacuum pumping, cooling, warming, and venting. We conclude that fabricating cryogenic DMs employing MEMS technology is a promising approach. Therefore, we intend to develop a more sophisticated device for actual use, and to look for potential applications including the Space Infrared Telescope for Cosmology & Astrophysics (SPICA), and other missions.
Bierden Paul
Enya Keigo
Kataza Hirokazu
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