50-mm MEMS deformable mirror

Physics – Optics

Scientific paper

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Scientific paper

A 50 mm diameter micromachined membrane mirror was designed and manufactured at TU Delft/DIMES in the framework of ESA's technology research program on adaptive optics. Equipped with 39 actuator electrodes the membrane mirror can be electrostatically deformed and used as a wavefront corrector. Functional and performance tests were carried out at Dornier Satellitensysteme GmbH to show its suitability for quasi- static correction of low-order aberrations caused by thermal and gravitational stresses in the future generation of large space telescopes.

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