320x240 microblometer uncooled IRFPA

Details 320x240 microblometer uncooled IRFPA 320x240 microblometer uncooled IRFPA

Jul 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4028...40m&link_type=abstract

Proc. SPIE Vol. 4028, p. 40-46, Infrared Detectors and Focal Plane Arrays VI, Eustace L. Dereniak; Robert E. Sampson; Eds.

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LETI LIR has been involved in Amorphous Silicon uncooled microbolometer development for a few years. This silicon IR detection is now well mastered and matured so that industrial transfer LETI/LIR technology is performed towards Sofradir. Industrial production of 320 X 240 mirobolometer array with 45 micrometer pitch started. After a short description of the technology and the readout circuit architecture we focus on device reliability which is the key point for microbolometer application. Methodology for reliability enhancement is described. First results obtained on amorphous silicon reliability are presented. Electro-optical results obtained from an IRCMOS 320 X 240 with 45 micrometer pitch are presented. NEDT close to 70 mK can be obtained with our standard microbolometer amorphous silicon technology.

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