Particle-in-cell/Monte Carlo collisions treatment of an Ar/O2 magnetron discharge used for the reactive sputter deposition of TiOx films

Physics

Scientific paper


  [ 0.00 ] – not rated yet Voters 0   Comments 0

Please leave your Comment & Rating

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.