Sputtered iridium coatings for grazing incidence x-ray reflectance

Details Sputtered iridium coatings for grazing incidence x-ray reflectance Sputtered iridium coatings for grazing incidence x-ray reflectance

Feb 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011...12b&link_type=abstract

Proc. SPIE Vol. 2011, p. 12-17, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds.

Physics

Optics

Scientific paper

The Advanced X-ray Astrophysics Facility--Imaging is one of two complementary space-based x-ray observatories being developed by NASA. Utilizing grazing incidence mirror elements in a Wolter Type I configuration, it will image x-ray sources over an energy range of 0.1 to 10 KeV. This paper describes the deposition of iridium/chromium coatings on Zerodur substrates using DC magnetron sputtering for use in grazing incidence configuration. Included are a description of the configuration and parameters of the deposition process, the results of x-ray performance measurements, and the implications of the results for scaling the deposition process to the full scale AXAF-I mirror elements.

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