Automated emissivity corrected wafer-temperature measurement in Aixtrons planetary reactors

Details Automated emissivity corrected wafer-temperature measurement in Aixtrons planetary reactors Automated emissivity corrected wafer-temperature measurement in Aixtrons planetary reactors

Feb 2003

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003jcrgr.248..235b&link_type=ejournal

Journal of Crystal Growth, vol. 248, pp. 235-239

Physics

4

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