Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry

Details Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry

Jun 2004

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004esasp.554..801l&link_type=abstract

In: Proceedings of the 5th International Conference on Space Optics (ICSO 2004), 30 March - 2 April 2004, Toulouse, France. Ed.:

Physics

Optics

Space Optics, Mirrors

Scientific paper

The micro-opto-electro-mechanical systems (MOEMS), based on mature technologies of micro-electronics, are essential in the design of future astronomical instruments. One of these key-components is the micro-deformable mirror for wave-front correction. Very challenging topics like search of exo-planets could greatly benefit from this technology. Design, realization and characterization of micro-Deformable Mirrors are under way at Laboratoire d'Astrophysique de Marseille (LAM) in collaboration with Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS). In order to measure the surface shape and the deformation parameters during operation of these devices, a high-resolution Twyman-Green interferometer has been developed. Measurements have been done on a tiltable micro-mirror (170×100μm2) designed by LAM-LAAS and realized by an American foundry, and also on an OKO deformable mirror (15mm diameter). Static characterization is made by phase shifting interferometry and dynamic measurements have been made by quantitative time-averaged interferometry. The OKO mirror has an actuator stroke of 370+/-10nm for 150V applied and its resonant frequency is 1170+/-50 Hz, and the tiltable mirror has a rotation cut-off frequency of 31±3kHz.

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