Surface correlation function analysis of high resolution scattering data from mirrored surfaces obtained using a triple-axis X-ray diffractometer

Details Surface correlation function analysis of high resolution scattering data from mirrored surfaces obtained using a triple-axis X-ray diffractometer Surface correlation function analysis of high resolution scattering data from mirrored surfaces obtained using a triple-axis X-ray diffractometer

Apr 1988

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1988apopt..27.1548c&link_type=abstract

(SPIE, Conference on Grazing Incidence Optics for Astronomical and Laboratory Applications, San Diego, CA, Aug. 17-19, 1987) App

Physics

Optics

12

Autocorrelation, Diffractometers, High Resolution, Mirrors, X Ray Scattering, Integrated Optics, Microstructure, Spaceborne Telescopes, Surface Roughness, Wavelengths

Scientific paper

Within various X-ray programs there exists a need for a detailed investigation of the surface roughness of mirrored surfaces over a wide spatial wavelength bandwidth, ranging from large scale figure error to microroughness. A number of methods exist to measure the surface roughness. Common to all methods is the fact that they are bandwidth-limited. A crucial point in the analysis of data is, therefore, to specify accurately the wavelength bandwidth limitation and to determine the surface autocorrelation function within this bandwidth. This paper presents a number of scattering measurements obtained using a triple-axis perfect-crystal X-ray diffractometer and the results of an autocorrelation function analysis. Furthermore, some measurements of integrated reflectivity are presented, which are believed to provide evidence of microroughness in the range from a few angstroms to tens of microns.

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