Fabrication-tolerant high quality factor photonic crystal microcavities

Details Fabrication-tolerant high quality factor photonic crystal microcavities Fabrication-tolerant high quality factor photonic crystal microcavities

2003-12-09

arxiv.org/abs/physics/0312060v1

Published in Optics Express, Vol. 12, No. 7, pp. 1458-1463, Apr. 5, 2004

Physics

Optics

3 pages, 3 figures

Scientific paper

10.1364/OPEX.12.001458

A two-dimensional photonic crystal microcavity design supporting a wavelength-scale volume resonant mode with a calculated quality factor (Q) insensitive to deviations in the cavity geometry at the level of Q~2x10^4 is presented. The robustness of the cavity design is confirmed by optical fiber-based measurements of passive cavities fabricated in silicon. For microcavities operating in the lambda = 1500 nm wavelength band, quality factors between 1.3-4.0x10^4 are measured for significant variations in cavity geometry and for resonant mode normalized frequencies shifted by as much as 10% of the nominal value.

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