New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure

Details New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure

2003-08-18

arxiv.org/abs/physics/0308071v2

Physics

Plasma Physics

6 paged, 8 figures

Scientific paper

10.1088/0963-0252/13/2/018

A new combined PIC-MCC approach is developed for accurate and fast simulation of a radio frequency discharge at low gas pressure and high density of plasma. Test calculations of transition between different modes of electron heating in a ccrf discharge in helium and argon show a good agreement with experimental data. We demonstrate high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating.

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