Sputtering of solid SO2

Details Sputtering of solid SO2 Sputtering of solid SO2

Feb 1984

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1984nimpb...1..321b&link_type=abstract

Nuclear Instruments and Methods in Physics Research Section B, Volume 1, Issue 2-3, p. 321-326.

Physics

6

Scientific paper

Solid SO2 has been bombarded by MeV and keV ions, and the
transformation of the deposited energy studied by investigating
sputtering from the surface. Measurements have been made of the total
yield, and the mass and energy distributions of ejected atoms and
molecules. These are examined in terms of existing sputtering models.

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