The Digital Piezo Transducer

Details The Digital Piezo Transducer The Digital Piezo Transducer

Jan 1986

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1986spie..628..451a&link_type=abstract

Advanced Technology Optical Telescopes III, Proceedings of the Meeting held 3-6 March 1986, in Tucson, AZ. Edited by Larry Barr

Physics

Scientific paper

The Digital Piezo Transducer (DPT) is a piezo electric actuator incorporating a capacitance micrometer as an integrated position sensor. This internal micrometer has a positional resolution of much better than a nanometre and no hysteresis. The DPT is operated in a closed servo loop and is capable of sub-nanometre resolution, repeatability and stability. Its response time is 0.2 msecs and it has a maximum range of 50 μm.

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