Physics
Scientific paper
Jul 2000
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000jvstb..18.2052k&link_type=ejournal
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 18, issue 4, p. 2052
Physics
15
Scientific paper
Not Available
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