Absolute multilayer characterization at high spatial resolution via real-time soft x-ray imaging

Details Absolute multilayer characterization at high spatial resolution via real-time soft x-ray imaging Absolute multilayer characterization at high spatial resolution via real-time soft x-ray imaging

Jul 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160..245m&link_type=toc

Proc. SPIE Vol. 1160, p. 245-0, X-Ray/EUV Optics for Astronomy and Microscopy, Richard B. Hoover; Ed.

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Optics

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