Physics – Optics
Scientific paper
Jul 1989
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160...19e&link_type=abstract
IN: X-ray/EUV optics for astronomy and microscopy; Proceedings of the Meeting, San Diego, CA, Aug. 7-11, 1989 (A90-46006 21-74).
Physics
Optics
1
Antireflection Coatings, Extreme Ultraviolet Radiation, Laminates, Reflectance, Aluminum, Dielectrics, Metal Oxides, Spectrographs, Thin Films
Scientific paper
The design and performance of multiple-layer, selective-reflection, selective-suppression coatings for the 900 - 1200 A band are described. These coatings are designed to optimize both high reflectivity at a desirable wavelength and low reflectivity at an undesirable wavelength. The minimum structure for a selective coating consists of a thin metal or metal oxide layer (50 - 150 A thickness) over an aluminum substrate protected with a semi-transparent dielectric (100 - 1000 A thickness). Predicted coating performance is strongly effected by varying the layer combination and thickness. A graphical method of optimizing the coating layer structure is developed. Aluminum, silicon, their oxides, and gold have been investigated as coating layer materials. A very simple coating with a 1026 to 1216 A reflectivity ratio greater than 100 was fabricated. Such reflection/suppression coatings may be of great utility to spaceborne EUV spectrographs.
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