Comparison Between Dust Particle Generation In CH4 or CH4/N2 Mixing RF Plasmas

Details Comparison Between Dust Particle Generation In CH4 or CH4/N2 Mixing RF Plasmas Comparison Between Dust Particle Generation In CH4 or CH4/N2 Mixing RF Plasmas

Oct 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..259p&link_type=abstract

NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum

Physics

Dusty Plasmas, Organic Compounds, Nitrogen, High-Frequency Discharges, Dust, Dusty Or Complex Plasmas, Plasma Crystals, High-Frequency And Rf Discharges

Scientific paper

Dust particles have been spontaneously generated either in pure CH4 or in CH4/N2 r.f. plasmas. The dust particle formation results from homogeneous nucleation in the plasma and is detected by laser light scattering (Ar+, λ = 514.5 nm). The temporal and spatial behaviour of dust particles is studied. In pure methane gas, particles are trapped in well defined clouds at the plasma sheath boundaries. In a CH4/N2 mixture, the nitrogen addition leads to an expansion of the clouds. For nitrogen contents higher than 50%, the space between the electrodes is nearly completely filled with dust particles leading to plasma instabilities and a void appears in the center of the discharge. The particles are spherical with diameters in the range 0.8-2 μm. For nitrogen-rich plasmas, the particles growth is improved and leads to a rough shape with an orange-peel-type surface texture.

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