Carbon Clustering and Diamond Nucleation in Fluorocarbon Plasmas

Physics

Scientific paper

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Dusty Plasmas, Carbon, Diamond, Nucleation, Molecular Clusters, Organic Compounds, Dusty Or Complex Plasmas, Plasma Crystals, Carbon, Diamond, Graphite, Plasma And Collective Effects In Clusters

Scientific paper

The ultra-nano crystalline diamond can be produced at room temerature in fluorocarbon (C4F8) plasmas. In the gas phase, the various ionic species were detected by quadrupole mass analyzer. The species included chain molecules of CnFk (4 <= n <= 14, n - 2 <= k <= 2n + 2), carbon clusters of Cn (10 <= n <= 14, 22 <= n <= 31, 36 <= n <= 39), and their derivatives. The clusters of nanometer scale tend to be heated up to several hundred K by ion impacts even in room-temperature plasmas, resulting in the crystallization of diamond.

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