Metrology for spatial interferometry

Details Metrology for spatial interferometry Metrology for spatial interferometry

Jun 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2200...27g&link_type=abstract

Proc. SPIE Vol. 2200, p. 27-34, Amplitude and Intensity Spatial Interferometry II, James B. Breckinridge; Ed.

Physics

1

Scientific paper

The accuracy of the relative metrology gauge developed for the proposed OSI and SONATA missions is improved to subpicometer level. An accuracy of 0.15 picometers is obtained in vacuum at time scales of a few minutes. A surface metrology gauge with an initial accuracy of (lambda) /1000 is under construction. Photometry accurate to better than 1 part in 10(superscript 3) for the surface metrology gauge is demonstrated using a commercial grade, 8-bit, uncooled CCD camera and a commercial grade frame grabber at time scales of 10 seconds with a resolution of 320 by 240 pixels.

Affiliated with

Also associated with

No associations

Rating

Metrology for spatial interferometry does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Metrology for spatial interferometry, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Metrology for spatial interferometry will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1509496