Physics
Scientific paper
Apr 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5276.....c&link_type=toc
Device and Process Technologies for MEMS, Microelectronics, and Photonics III. Edited by Chiao, Jung-Chih; Hariz, Alex J.; Jami
Physics
Scientific paper
Not Available
Chiao Jung-Chih
Hariz Alex J.
Jamieson David N.
Parish Giacinta
Varadan Vijay K.
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