Silicon Oxynitride Stability

Details Silicon Oxynitride Stability Silicon Oxynitride Stability

Sep 1969

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1969sci...165.1363r&link_type=abstract

Science, Volume 165, Issue 3900, pp. 1363-1364

Physics

6

Scientific paper

Silicon oxynitride occurs as a mineral (sinoite) in meteorites. Equilibrium measurements are reported which provide information on the approximate ratios of pressures of oxygen to nitrogen required for existence of this phase under equilibrium conditions at elevated temperatures. This ratio is approximately 10-15 at 1400 degrees to 1500 degrees C.

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