Cleaning Strategies and Depth Profiling of Genesis 60130 Silicon

Details Cleaning Strategies and Depth Profiling of Genesis 60130 Silicon Cleaning Strategies and Depth Profiling of Genesis 60130 Silicon

Mar 2011

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011lpi....42.2528l&link_type=abstract

42nd Lunar and Planetary Science Conference, held March 7–11, 2011 at The Woodlands, Texas. LPI Contribution No. 1608, p.2528

Physics

Scientific paper

Further cleaning strategies for Genesis silicon 60130 were used to
remove particulate matter and thin-film contamination. Surface analysis
using TOF-SIMS showed that micrometer-sized particulates were, however,
still present.

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