Optimization of a Cold Field Emission Electron Gun for a Miniaturized Scanning Electron Microscope

Details Optimization of a Cold Field Emission Electron Gun for a Miniaturized Scanning Electron Microscope Optimization of a Cold Field Emission Electron Gun for a Miniaturized Scanning Electron Microscope

Mar 2010

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010lpi....41.2676m&link_type=abstract

41st Lunar and Planetary Science Conference, held March 1-5, 2010 in The Woodlands, Texas. LPI Contribution No. 1533, p.2676

Physics

Scientific paper

The field emission and the effects of aberrations of an electron gun
will be examined, through simulations and testing of a prototype, to
optimize the gun for a miniaturized scanning electron microscope.

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