Surface roughness measurement of aspheric surfaces

Details Surface roughness measurement of aspheric surfaces Surface roughness measurement of aspheric surfaces

Jan 1979

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1979spie..184..176l&link_type=abstract

In: Space optics: Imaging X-ray optics workshop; Proceedings of the Seminar, Huntsville, Ala., May 22-24, 1979. (A80-17469 05-89

Physics

Optics

1

Asphericity, Diffraction Patterns, Interferometry, Optical Measurement, Surface Roughness, X Ray Telescopes, Heao 2, Mirrors, Polishing, Spaceborne Telescopes, Surface Finishing

Scientific paper

A method of measuring the surface roughness of aspheric surfaces is described. The method combines surface replication techniques and FECO (fringes of equal chromatic order) interferometry to provide a relatively simple way of obtaining numerous surface roughness measurements of uncoated aspheric surfaces during final polishing. A series of measurements was carried out on a 30-A calibration sample over a long period of time and gave an average measured surface roughness by replication of 33 A + or - 8 A.

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