In situ long trace profiler for measurement of Wolter type-I mirror

Details In situ long trace profiler for measurement of Wolter type-I mirror In situ long trace profiler for measurement of Wolter type-I mirror

Aug 2010

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010spie.7801e..15c&link_type=abstract

Advances in Metrology for X-Ray and EUV Optics III. Edited by Assoufid, Lahsen; Takacs, Peter Z.; Asundi, Anand K. Proceeding

Physics

Optics

Scientific paper

The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab, an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism, structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6μrad rms for slope error with a stability of 1.33μrad during the whole measurement period. This can meet further fabrication requirements.

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