Physics
Scientific paper
Oct 2003
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003njph....5..133m&link_type=abstract
New Journal of Physics, Volume 5, Issue 1, pp. 133 (2003).
Physics
3
Scientific paper
The interaction of CH3 and H with amorphous hydrocarbon surfaces plays a central role during plasma deposition of such films. Recently, this interaction has been explored in particle beam experiments. A rate equation model has been proposed which explains the experimental observations on the basis of elementary surface reactions. This model includes several parameters which have the meaning of either a reaction cross section or a rate constant. The predictive power of the model and its applicability to more complex hydrocarbon deposition processes hinges on a reliable determination of the model parameters. In this paper, we develop a Bayesian analysis of the data. The result of this analysis are estimation distributions for each parameter rather than single numbers. We use this in-depth information to draw valuable conclusions about the ability of the model to describe the surface reactions. We find strong indications for a dependence of the reaction cross sections on the particles' angle of incidence.
Dose Volker
Meier Matthias M. M.
Preuss Roland
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