The behaviour of surfaces under ion bombardment

Details The behaviour of surfaces under ion bombardment The behaviour of surfaces under ion bombardment

Feb 1975

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1975rpph...38..241m&link_type=abstract

Reports on Progress in Physics, vol. 38, Feb. 1975, p. 241-327.

Physics

45

Elastic Scattering, Inelastic Scattering, Ion Impact, Ion Scattering, Sputtering, Surface Reactions, Angular Distribution, Backscattering, Electron Emission, Energy Distribution, Ion Irradiation, Light Emission, Radiation Damage, Secondary Emission, X Rays

Scientific paper

The processes involved in the bombardment of surfaces by ions are discussed in two categories: one, in which the processes are caused by elastic collisions (sputtering or ion scattering), and one where the processes are due to inelastic collisions, leading to excitation and ionization and resulting in the emission of X-rays, optical photons, and electrons. The mechanisms involved in ion scattering and sputtering are identified. The energy and angular distributions of secondary particles are studied for both categories, and are compared with the results of modern theories. The effect of sputtering on the erosion of surfaces is examined, along with the effects of radiation blistering (i.e., the blistering of surfaces under the impact of gaseous ions) and the effects of radiation damage on surface topography.

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