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Sebastian Oestreich

Computer Science – Performance

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Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability

Computer Science – Performance
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Multilayer reflectance during exposure to EUV radiation

Physics
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New PTB beamlines for high-accuracy EUV reflectometry at BESSY II

Statistics – Applications
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Profile ID: LFWR-SCP-P-632791

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