Mathematics
Logic
Scientist
Texas Instruments, USA
Texas Instruments Inc., USA
65nm node gate pattern using attenuated phase shift mask with off-axis illumination and sub-resolution assist features
Design rule considerations for 65-nm node contact using off axis illumination
Improving asymmetric printing and low margin using custom illumination for contact hole lithography
No associations
LandOfFree
Robert Soper does not yet have a rating. At this time, there are no reviews or comments for this scientist.
If you have personal experience with Robert Soper, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Robert Soper will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-P-659306