4. Physics
  5. Condensed Matter
  6. Materials Science

Kazuo Sato

Physics – Condensed Matter – Materials Science

Scientist

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Scientist

Department of Micro-Nanosystem Engineering, Nagoya University, Nagoya 464-8603, Japan

Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si

Physics – Condensed Matter – Materials Science
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Effect of Cu impurities on wet etching of Si(110): formation of trapezoidal hillocks

Physics
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Profile ID: LFWR-SCP-P-336179

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