4. Physics
  5. Plasma Physics

Katja Rügner

Physics – Plasma Physics

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Deposition of SiOx films by means of atmospheric pressure microplasma jets

Physics – Plasma Physics
Scientific paper

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The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure

Physics – Plasma Physics
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Profile ID: LFWR-SCP-P-60559

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