Rejection of Power Supply Noise in Wheatstone Bridges : Application to Piezoresistive MEMS

Details Rejection of Power Supply Noise in Wheatstone Bridges : Application to Piezoresistive MEMS Rejection of Power Supply Noise in Wheatstone Bridges : Application to Piezoresistive MEMS

2008-05-07

arxiv.org/abs/0805.0925v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Scientific paper

This paper deals with the design of MEMS using piezoresistivity as transduction principle. It is demonstrated that when the sensor topology doesn't allow a perfect matching of strain gauges, the resolution is limited by the ability of the conditioning circuit (typically a Wheatstone bridge) to reject power supply noise. As this ability is strongly reduced when an offset voltage is present at the output of the bridge, the proposed architecture implements a feedback loop to control MOS transistors inserted in the Wheatstone bridge to compensate resistor mismatches. This feedback exhibits a very good offset cancellation and therefore a better resolution is achieved.

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