Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers

Details Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers

2008-05-07

arxiv.org/abs/0805.0920v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Scientific paper

This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This "electro-physical" modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.

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